CiS Forschungsinstitut für Mikrosensorik GmbH

Profile

CiS Forschungsinstitut für Mikrosensorik GmbH, with approximately 120 employees, develops silicon-based microsensors and microsystems (MEMS/MOEMS). Its expertise encompasses application-specific design, process development, and analytics. Building on more than 30 years of “Competence in Silicon,” the company’s expertise ranges from R&D services to small-batch production of customer-specific microcomponents.

Technology / Research

Key Research Areas:

• Micro-Optical Systems (MOEMS), such as optoelectronic sensors ranging from UV to IR for gas analysis and medical applications, as well as silicon detectors and radiation detectors for science and industry.
• Micro-Electro-Mechanical Systems (MEMS), including piezoresistive pressure sensors, force sensors, and strain gauges.

Core Technologies:

• Silicon-based processes for miniaturization and the integration of sensor and electronic functions into wafers and chips.
• In-house semiconductor processing
• Assembly and interconnection technology
• Prototyping, small-batch production, and metrology at the wafer and chip/module levels
• Material and nanoanalysis, as well as reliability testing of sensors.

Products / Services

• Feasibility studies
• Customized developments in the field of silicon sensor technology, from design through to series production
• Services in the fields of assembly and interconnection technology, as well as measurement technology and analytics

Information

CiS Forschungsinstitut für Mikrosensorik GmbH, with approximately 120 employees, develops silicon-based microsensors and microsystems (MEMS/MOEMS). Its activities cover the entire value chain—from design and wafer processing to prototype development. Building on more than 30 years of “Competence in Silicon,” the institute’s expertise ranges from R&D services to quality-assured small-batch production of customer-specific microcomponents. The institute supports companies in the development of optical, micromechanical, and piezoresistive sensors. The institute’s sensors contribute to addressing current challenges in energy, the environment, medical technology, and industry. They detect conditions, convert them into measurement data, and thereby enable efficient, safe, and sustainable processes.