MICRO-EPSILON MESSTECHNIK GmbH & Co. KG

Micro-Epsilon is one of the leading manufacturers of precision sensor technology. For more than 50 years, we have been developing and producing innovative sensors and sensor systems for future-oriented industries. With above-average development expenditures, a high level of know-how and a broad network of cooperations, we create sensors with the highest precision. Through further developments of measurement methods, application experience in various industries and technical innovations, we create sensor products that achieve significant added value for our customers.

More precision

High-precision sensors and measurement systems from Micro-Epsilon are used in all important industrial sectors - from mechanical engineering to automated production lines and integrated OEM solutions. In the semiconductor industry, sensor technologies from Micro-Epsilon have proven themselves for many years and solve for numerous measurement tasks with high precision - in complex front-end processes, back-end applications and in wafer fab automation.

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• Vacuum compatible sensors and sensor actuator systems
• High precision displacement and distance sensors
• Customized sensor development for series applications

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• High precision electromagnetic distance sensors (eddy current / capacitive)
• High resolution confocal chromatic sensors for distance and thickness measurement
• White light interferometer for distance and thickness measurement with subnanometer resolution

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