Singulus Technologies AG

SINGULUS TECHNOLOGIES - Thin Film Technology and Surface Treatment

SINGULUS TECHNOLOGIES develops and manufactures innovative machines and systems designed to deliver highly efficient thin-film coating and surface treatment processes. Their solutions are used globally in a variety of sectors, including photovoltaics, semiconductors, medical technologies, packaging, glass & automotive, as well as battery & hydrogen applications. The company's core competencies include coating technology processes, surface treatment, wet chemical and thermal production processes.

Singulus Technologies offers state of the art, mass production compatible cluster tools for vacuum deposition on 200 mm and 300 mm wafers. Versatile Thanks to the broad spectrum of available deposition and conditioning modules the TIMARIS Cluster Tool makes it the ideal PVD Production Platform for a wide range of applications in the semiconductor industry. Future-proof It fulfils all connectivity standards of modern 200 mm and 300 mm foundries and is compatible with GEM300 and SECS/GEM host interfaces and allows advanced process control (APC) necessary for state-of-the art quality control. All modules are capable to handle 200 mm and 300 mm wafers (smaller wafers via adapters). Cost efficient SINGULUS TECHNOLOGIES offers modules with several targets and integrated heating/cooling/aligning magnetic field (AMF). This allows to very efficiently manufacture complex multi-layer-structures in just one module, saving cleanroom space as well as production time through reduction of unnecessary inter-module transfers.

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SINGULUS TECHNOLOGIES is a renowned manufacturer of advanced vacuum deposition equipment for MRAM, thin film heads, sensors, inductors and other semiconductor applications. The company is a key partner in developing and producing a wide range of components, constantly pushing the boundaries of what is possible and helping to drive progress in the field of vacuum deposition technology. The vacuum deposition systems of the TIMARIS platform offer a complete family of process modules for a variety of applications. - TMR, pTMR - MRAM - Magnetic sensor (GMR, AMR, TMR) - Integrated inductors - Integrated voltage regulator (buck converter) - MEMS - High moment materials - TFH reader & writer